Supply of 300Mm Mechanical-Chemical Polishing Equipment Tender
Notice for Supply of 300Mm Mechanical-Chemical Polishing Equipment in France. The reference ID of the tender is 141172922 and it is closing on 26 May 2026.
Tender Details
- Country: France
- Summary: Supply of 300Mm Mechanical-Chemical Polishing Equipment
- FRT Ref No: 141172922
- Deadline: 26 May 2026
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 327172-2026
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- Description:
- Supply of 300mm mechanical-chemical polishing equipment For its research activities aimed at the development of FD-SOI technologies 10 nm and beyond, CEA-LETI wishes to acquire 300mm mechanical-chemical polishing equipment. The equipment must be able to polish metal films such as copper or tungsten as well as barrier materials such as tantalum or titanium. The equipment must also be capable of polishing transparent plates. It must be equipped with 4 trays and 2 cleaner to be able to process 2 processes in parallel. It must be equipped with the latest generation polishing heads and end-point systems allowing automatic adjustment of the polishing profile. The tool must subsequently integrate a module of in-situ metrology. This contract includes the following mandatory option: - Option no. 1: Extension of the warranty for an additional year. This contract includes the following optional options: - Option no. 2: Supply of a residue sensor (§3.1 of the specifications), - Option no. 3: Supply of a heat exchanger/cooler (§3.2.6 of the specifications), - Option no. 4: Supply of an electrical transformer (§4.1.3 of the specifications), - Option no. 5: 1st maintenance training level (§9 of the specifications), - Option n°6: Advanced maintenance training (§9 of the specifications), - Option n°7: The price of transport, insurance included, according to the DAP CEA Grenob conditions...
- Documents:
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CLICK HERE TO LOGINSupply of 300Mm Mechanical-Chemical Polishing Equipment - France Tender
The CEA GRENOBLE, a Government sector organization in France, has announced a new tender for Supply of 300Mm Mechanical-Chemical Polishing Equipment. This tender is published on FranceTenders under FRT Ref No: 141172922 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2026-05-26.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
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